Mercury II™ Series – MII6000

Mercury II’s advanced sensor design achieves resolutions up to 1.2nm and high accuracy performance in a compact sensor body.

Specifications of MercuryII™ Series – MII6000

Dimensions22.6 x 12.7 x 8.1 mm
Interface, DigitalA quad B with index and limits
Interface, Analog-
Interpolationup to ×16,384 in the connector
Resolutions5 µm - 1.2 nm
Accuracy Class, Linear Glassup to +/- 1 µm
Accuracy Class, Linear Metal Tape-
Grating Pitch20 µm
Max Speed5 m/s
Operating EnvironmentAtmospheric

Linear Scale/Grating Compatibility

MT, TSMIIL
Highest Accuracy Class+/- 5µm+/- 3µm
Measuring Lengthup to 30mup to 995mm
Width6mm6mm/20mm
IndexCenterCenter
MaterialInconel 625Soda lime glass
Coefficient of Thermal Expansion13ppm/°C8ppm/°C
MountingPressure Sensitive AdhesiveEpoxy