Mercury™ Series – M1000V

Mercury™ vacuum encoders are specified in a wide range of applications for their combination of performance, small size, and high vacuum rating. Choose from models with digital or analog output, all constructed using vacuum-compatible materials rated up to 10-8 torr.

  • The M1000V sensor is vented and constructed with vacuum compatible materials and designed for a 48 hour bake out at 150°C.
  • Miniature sensor fits into tight spaces
  • Wide alignment tolerance make for easy installation and setup
  • Analog outputs can be interpolated by the customer’s electronics for resolution up to 78nm
  • Low power consumption aids in thermal stability of the system

Specifications of Mercury™ Series – M1000V

Dimensions20.6 x 12.7 x 8.4 mm
Interface, Digital-
Interface, Analog1 Vpp sin/cos with index
Interpolationup to ×256 in customer electronics
Resolutions5 µm - 78 nm
Accuracy Class, Linear Glassup to +/- 1 µm
Accuracy Class, Linear Metal Tape-
Grating Pitch20 µm
Max Speed7.2 m/s
Operating EnvironmentVacuum up to 10^-8

Grating Compatibility

MIIL
Highest Accuracy Class+/- 1µm
Measuring Lengthup to 995mm
Width6mm/20mm
IndexCenter
MaterialSoda lime glass
Coefficient of Thermal Expansion8ppm/°C
MountingEpoxy
MicroE Optical Encoder - Mercury II Series MII6000V
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