MercuryII™ Series – MII6000V

Mercury II™ digital output high-vacuum rated encoders offer class-leading resolution, accuracy, and small sensor size. With MicroE’s broad alignment tolerances, no other commercially available 10-8 Torr rated encoder is easier to align, easier to use, or easier to integrate into your designs.

Specifications of Mercury II™ Series – MII6000V

Dimensions22.6 x 12.7 x 8.1 mm
Interface, DigitalA quad B with index and limits
Interface, Analog-
Interpolationup to ×16,384 in the connector
Resolutions5 µm - 1.2 nm
Accuracy Class, Linear Glassup to +/- 1 µm
Accuracy Class, Linear Metal Tape-
Grating Pitch20 µm
Max Speed5 m/s
Operating EnvironmentVacuum up to 10^-8

Grating Compatibility

Highest Accuracy Class+/- 1µm
Measuring Lengthup to 995mm
MaterialSoda lime glass
Coefficient of Thermal Expansion8ppm/°C