High Vacuum
Compact Precision Encoders for High Vacuum Applications
Mercury™ Series
Model: M1000V
Mercury™ vacuum encoders are specified in a wide range of applications for their combination of performance, small size, and high vacuum rating. Choose from models with digital or analog output, all constructed using vacuum-compatible materials rated up to 10-8 torr.
Specifications
Dimensions 20.6 x 12.7 x 8.4 mm
Interface, Digital -
Interface, Analog 1 Vpp sin/cos with index
Interpolation up to x256 in customer electronics
Resolutions 5 µm - 78 nm
Accuracy Class, Linear Glass up to +/- 1 µm
Accuracy Class, Linear Metal Tape -
Grating Pitch 20 µm
Max Speed 7.2 m/s
Operating Environment Vacuum up to 10^-8
Linear Scale/Grating Compatibility
  L
Highest Accuracy Class +/- 1µm
Measuring Length up to 2020
Width 20mm
Index Center or end
Material Soda lime glass
Coefficient of Thermal Expansion 8ppm/°C
Mounting Epoxy

Product Benefits: 

Benefits
  • The M1000V sensor is vented and constructed with vacuum compatible materials and designed for a 48 hour bake out at 150°C.
  • Miniature sensor fits into tight spaces
  • Wide alignment tolerance make for easy installation and setup
  • Analog outputs can be interpolated by the customer’s electronics for resolution up to 78nm
  • Low power consumption aids in thermal stability of the system
Celera Motion PathFinder

Find the products and solutions that can accelerate your innovation