High Vacuum
Compact Precision Encoders for High Vacuum Applications
Mercury™ Series
Model: M1500V
Mercury™ vacuum encoders are specified in a wide range of applications for their combination of performance, small size, and high vacuum rating. Choose from models with digital or analog output, all constructed using vacuum-compatible materials rated up to 10-8 torr.
Specifications
Dimensions 20.6 x 12.7 x 8.4 mm
Interface, Digital A quad B with index
Interface, Analog -
Interpolation up to 40x in sensor
Resolutions 5 µm - 0.5 µm
Accuracy Class, Linear Glass up to +/- 1 µm
Accuracy Class, Linear Metal Tape -
Grating Pitch 20 µm
Max Speed 7.2 m/s
Operating Environment Vacuum up to 10^-8
Linear Scale/Grating Compatibility
  L
Highest Accuracy Class +/- 1µm
Measuring Length up to 2020
Width 20mm
Index Center or end
Material Soda lime glass
Coefficient of Thermal Expansion 8ppm/°C
Mounting Epoxy

Product Benefits: 

Benefits
  • The M1500V sensor is vented and constructed with vacuum compatible materials and designed for a 48 hour bake out at 150°C.
  • Miniature sensor fits into tight spaces
  • Wide alignment tolerance make for easy installation and setup
  • Built-in interpolation produces digital outputs with up to 0.5μm resolution
  • Low power consumption aids in thermal stability of the system
Celera Motion PathFinder

Find the products and solutions that can accelerate your innovation