High Vacuum
Compact Precision Encoders for High Vacuum Applications
Mercury II™ Series
Model: MII6000V
Mercury II™ digital output high-vacuum rated encoders offer class-leading resolution, accuracy, and small sensor size. With MicroE’s broad alignment tolerances, no other commercially available 10-8 Torr rated encoder is easier to align, easier to use, or easier to integrate into your designs.
Dimensions 22.6 x 12.7 x 8.1 mm
Interface, Digital A quad B with index and limits
Interface, Analog -
Interpolation up to x16,384 in the connector
Resolutions 5 µm - 1.2 nm
Accuracy Class, Linear Glass up to +/- 1 µm
Accuracy Class, Linear Metal Tape -
Grating Pitch 20 µm
Max Speed 5 m/s
Operating Environment Vacuum up to 10^-8
Linear Scale/Grating Compatibility
Highest Accuracy Class +/- 1µm
Measuring Length up to 995mm
Width 6mm/20mm
Index Center
Material Soda lime glass
Coefficient of Thermal Expansion 8ppm/°C
Mounting Epoxy

Product Benefits: 

  • The MII 6000V sensor is vented and constructed with vacuum compatible materials and designed for a 48 hour bake out at 150°C.
  • Mercury II’s encoder technology achieves the highest resolution and accuracy in its class, with low cyclical error, low jitter, smaller sensors, and lower power consumption.
  • Mercury II’s low cyclical error surpasses every other 20μm encoder. The benefits are smoother velocity control for linear motors, stages and wire bonders; More precise, and faster linear positioning.
  • Smallest scale system available: only 6mm wide, including index and limits - less than 1/2 the width of other encoder systems.
  • Broadest Alignment Tolerances: With the broadest alignment tolerances in the industry, a full +/-2 degrees, Mercury II is the easiest and the fastest sensor to align and setup. You can align the Mercury II sensor in under 30 seconds.
  • Built-in Optical Index and Limits: Order linear glass scales with built-in markers for fast installation.
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