The D1430 is a linear air bearing specifically designed to operate in a very vacuum environment, such as in a wafer ion inplantation chamber. The linear stroke length can be up to 508mm in a vertical orientation, and rotation is also possible. The wafer chuck can be attached at one end of the hollow shaft and a linear motor to the other end.
| Stroke lengths | up to 508mm (for vertical operation) |
| Shaft rotation | 0 to 360 degrees |
| Bearing air pressure | 5.6 kg/cm*2 |
| Shaft diameters | up to 85mm |
| Body diameters | up to 200mm |
| Moment load (typical) | 79 Nm |
| Vacuum seals | Non-contacting |
| Application | Up to 300mm dia. wafers |
Have a question about the Air Bearing Spindles product range? Here we answer a selection of frequently asked questions.
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