The M290 is a large wafer grinding spindle with a maximum speed of 15,000rpm, used for grinding the faces of 200mm and 300mm diameter wafers. Fitted with a powerful direct drive AC motor, it can be flange mounted for easy installation. Options include through-shaft coolant, speed sensor and customised wheelmounts.
| Speed range | 1500 –15,000 rpm |
| Motor power | 4 kW @ 4000 rpm |
| Axial stiffness | 17.8 kg/micron |
| Axial load | 249 kg |
| Radial stiffness (at nose) | 4.45 kg/micron |
| Radial load (at nose) | 90 kg |
| Bearing air pressure | 5.6 kg/cm*2 |
| Bearing air consumption | 232 nl/min |
| Water cooling flowrate | 0.75 - 1.9 l/min |
| Axial runout | < 0.1 microns |
| Overall length | 796 mm |
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