D1234

The D1234 is a large workhead spindle with a maximum speed of 900rpm, suitable for supporting up to 300mm diameter wafer vacuum chucks for grinding processes. It is fitted with a smooth, low speed, direct drive brushless DC motor and high accuracy encoder. Belt drive versions are also available.

Specifications of D1234 workhead spindle

Speed range1 - 900 rpm
Motor power190 W @ 400 rpm
Axial stiffness26.7 kg/micron
Axial load253 kg
Radial stiffness (at nose)19.6 kg/micron
Radial load (at nose)136 kg
Bearing air pressure5.6 kg/cm*2
Bearing air consumption70 nl/min
Water cooling flowrate0.26 l/min
Axial runout< 0.1 microns
Overall length535 mm