D1430

The D1430 is a linear air bearing specifically designed to operate in a very vacuum environment, such as in a wafer ion inplantation chamber. The linear stroke length can be up to 508mm in a vertical orientation, and rotation is also possible. The wafer chuck can be attached at one end of the hollow shaft and a linear motor to the other end.

Specifications of D1430

Stroke lengthsup to 508mm (for vertical operation)
Shaft rotation0 to 360 degrees
Bearing air pressure5.6 kg/cm*2
Shaft diametersup to 85mm
Body diametersup to 200mm
Moment load (typical)79 Nm
Vacuum sealsNon-contacting
Application Up to 300mm dia. wafers