Metrology surface inspection is used to detect and eliminate defects as early as possible, executing quality control during the manufacturing process. Accurate and precise motion control is highly important to avoid lost time, cost to rework material, and overall system failures. Celera Motion’s Agility™ motors, Optira™ encoders, and Everest servo drives – combined in a compact package – deliver ultra-smooth motion and extremely precise results for the highest quality imaging and scanning data to be collected.

The Challenge

Metrology surface inspection is used to look at micron or sub-micron accuracy, detecting and eliminating defects as early as possible, executing quality control of the overall system during the manufacturing process. If readings are inaccurate, defects may pass through quality control. Higher defect rates can result in increased rejected material, or even worse, system failure in field units. Accurate and precise motion control is highly important for metrology applications to detect defects early in the manufacturing process, avoiding lost time, cost to rework material, and overall system failures. Smooth motion is needed for precision results and quality assurance.

The Solution

Agility Series motor kits are designed with ZeroCog™ slotless motor technology that eliminates cogging torque. The accurate motion enables the highest quality imaging and scanning data to be collected, reducing material rework. Fast settling times made possible from the direct drive stages allows the system to collect a large amount of data quickly and accurately, saving manufacturing operation time. Optira Series encoders provide extremely high accuracy and resolution, enabling precise positioning capabilities of the scanning system to ensure accurate measurement results. Everest Series servo drives deliver the highest PWM switching frequency and efficiency, reducing motor heat. When the Agility Series motor and Everest Series servo drive are paired together, overall system hardware temperature is lowered. This ensures less thermal expansion and less error in the target measurement.

The Benefit

Celera Motion’s ZeroCog™ slotless motor technology used in the Agility Series motors, enables extremely smooth and highly accurate motion. Optira Series encoders deliver unprecedented performance with resolution up to 5nm for linear applications and up to 75M CPR for rotary applications. Everest Series servo drives deliver industry leading PWM rates up to 100 kHz, minimizing motor heating. Combined together – Agility motors, Optira encoders, and Everest servo drives – delivers ultrasmooth motion and extremely precise scanning results, all in one compact package.

Specifications

Cogging Torque Zero
Through Hole (Rotor ID) 5.00 to 190.50 mm
Resolution Up to 75M CPR (rotary) or Up to 5nm (linear)
Accuracy Up to +/- 2 arc-seconds (rotary) or Up to +/- 1 µm/m (linear)
PWM Frequency 10 – 100 kHz
Standby Power Consumption <1.5 W
Efficiency Up to 99%

Specifications dependent on model and subject to change.