Newly designed precision linear stage mechanism is capable of runout adjustment in the Y and Z axes by using a Juke™ voice coil motor and a Mercury™ encoder as the core components to deliver exceptional performance.

The Challenge

The constant advancement of semiconductor technology and shrinking size of wafer features, drives wafer metrology equipment to ever-increasing levels of precision motion control to ensure the optical system components meet these demanding performance requirements.  Runout in the two axes perpendicular to the axis of motion, roundness of drilled holes, and the dynamics during and at the end of motion are especially critical.  Low and consistent friction and optimal move and settle performance is required.  Designing and manufacturing mechatronics assemblies that reliably achieve this level of performance requires a trusted precision motion partner with advanced mechatronics expertise, high performance motor and encoder components, complex microfabrication processes and expert knowledge of bearing systems, special materials and manufacturing processes.

The Solution

Using a Juke voice coil motor and a Mercury encoder as the core components to deliver the required performance, the mechatronics team at Celera Motion designed a precision linear stage mechanism, capable of runout adjustment in the Y and Z directions.  Special materials and microfabrication processes were utilized to meet the customer’s demanding performance and environmental specifications.  The Celera Motion team implemented efficient and scalable test and calibration methods that include Coordinate Measuring Machine (CMM) instruments, confocal lasers, load cells, digital cameras and a single axis motion controller, all controlled by Celera Motion’s in-house software program.  The design and manufacturing processes were successfully introduced and ramped to serial production quickly to meet the customer’s demanding delivery schedule.

The Benefit

The precision stage design, when used in combination with the custom calibration and test software, is capable of achieving ultra-fine runout capabilities within minutes of final assembly.  The ability to design a precision slide, that is also adjustable and can move and settle in tens of milliseconds, requires state of the art design and hardware.  Celera Motion encoders offer industry leading optical alignment margins and nanometer level resolution.  Celera Motion’s motor line specializes in high output to form factor ratios, making them ideal for specialized jobs where minimal space and maximum performance requirements are at a premium.

Specifications

Mercury™ Series Encoder

Sensor Dimensions20.6 x 12.7 x 8.4 mm
Interface, DigitalA quad B with index
Resolution0.078 µm
Accuracy Class+ / - 0.1 µm
Grating Period20 µm
Sensor Weight1.6 g

Juke™ Series Motor

Force5 to 46 N
Stroke2 to 40 mm
Continuous Power3 to 18 Watts
Outside Diameter19 to 32 mm
Length25 to 38 mm