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MicroE Optical Encoders
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Linear Encoders
Linear Encoders
NANO –
Miniature Precision Linear Encoders for the World’s Smallest Spaces
Aura Series /
Optira Series / ChipEncoder Series / Mercury Series
Quick Specs
Aura® Series
Model: AUR
Resolution
± 12.5 to 200 nm
Accuracy
± 2 μm
Interface
BiSS-C, SSI, SPI, ABZ
Download Datasheet
Quick Specs
Optira™ Series
Model: PI
Resolution
5μm to 5nm
Interface
A-quad-B digital or 1Vpp sin/cos analog
Accuracy
to +/-1μm/m
Download Datasheet
Quick Specs
ChipEncoder™ Series CE
Model: CE
Resolution
from 10µm to 1µm
Interface
A-quad-B digital
Accuracy
to +/-1 µm/m
Download Datasheet
Quick Specs
ChipEncoder™ Series CE300
Model: CE300
Dimensions
7x11mm
Resolution
from 10µm to 1µm
Interface
A-quad-B digital
Accuracy
to +/-1 µm/m
Download Datasheet
Quick Specs
Mercury Series M1200
Model: M1200
Resolution
5µm to 78nm
Interface
1Vpp analog with index
Accuracy
to +/-1 µm/m
Download Datasheet
Quick Specs
Mercury Series M1500P
Model: M1500P
Resolution
5µm to 0.5µm
Interface
A-quad-B digital
Accuracy
to +/-1 µm/m
Download Datasheet
COMPACT
– Precision Linear Encoders for the World’s Machines and Instruments
Mercury Series / Mercury II Series
Quick Specs
Mercury™ Series M1000
Model: M1000
Resolution
5µm to 78nm
Interface
1Vpp analog interface with index
Accuracy
to +/-1 µm/m
Extras
EMI shielded for use in the toughest environments
Download Datasheet
Quick Specs
Mercury™ Series M1500H
Model: 1500H
Resolution
5 µm to 0.5 µm
Interface
A-quad-B digital interface with index
Accuracy
to +/-1 µm
Download Datasheet
Quick Specs
Mercury™ Series M1500S
Model: M1500S
Resolution
5 µm to 0.5 µm
Interface
A-quad-B digital interface with index
Accuracy
to +/-1 µm
Download Datasheet
Quick Specs
Mercury II™ Series MII5000
Model: MII5000
Resolution
from 5µm to 1.2nm
Interface
A-quad-B digital with index and limits
Accuracy
to +/-1 µm/m
Extras
all electronics in the sensor
Download Datasheet
Quick Specs
Mercury II™ Series MII6000
Model: MII6000
Resolution
from 5µm to 1.2nm
Accuracy
to +/- 1µm /m
Interface
A-quad-B digital with index and limits
Sensor head
compact
Download Datasheet
HIGH VACUUM
– Compact Precision Linear Encoders for High Vacuum Applications
Mercury Series / Mercury II Series
Quick Specs
Mercury Series M1000V
Model: M1000V
Resolution
from 5µm to 78nm
Interface
1Vpp analog interface with index
Accuracy
to +/-1 µm/m
Rated for vacuum
10
-8
Torr
Download Datasheet
Quick Specs
Mercury Series M1500V
Model: 1500V
Resolution
from 5µm to 0.5µm
Interface
A-quad-B digital with index
Accuracy
to +/-1 µm/m
Rated for vacuum
10
-8
Torr
Download Datasheet
Quick Specs
Mercury II Series MII6000V
Model: MII6000V
Resolution
from 10µm to 1µm
Interface
A-quad-B digital with index and limits
Accuracy
to +/-1 µm/m
Rated for vacuum
10
-8
Torr
Download Datasheet